tamo moho mahā-tamaḥ

sasarja-created; chayaya-with his shadow; avidyam-ignorance; panca-parvanam-five varieties; agratah-first of all; tamisram-tamisra; andha-tamisram-andha-tamisra; tamah-tamas; mohah-moha; maha-tamah-mahatamas or mahamoha.